300,000 pae hoʻomaʻemaʻe lepo

ʻO ka wehewehe pōkole:

Wahi a ka "Cleanrooms and Related Controlled Environments", ʻo ka maʻemaʻe e pili ana i ka nui o ka ʻae ʻia o nā ʻāpana o ka hopohopo (ʻo ka ʻāpana ka helu o nā ʻāpana i kēlā me kēia mika cubic o ka ea).


Huahana Huahana

Huahana Huahana

Ka pae hoʻomaʻemaʻe ea ISO14644-1 (maʻamau honua)

 

Ka pae hoʻomaʻemaʻe ea ISO14644-1 (maʻamau honua)

pae hoʻomaʻemaʻe ea (N) ʻOi aku ka nui a i ʻole like me ka nui o ka nui o ka nui o nā ʻāpana ea i kaha ʻia (ka helu o nā ʻāpana ea/m3)
0.1um 0.2um 0.3um 0.5um 1.0um 5.0um
Papa ISO1 10 2        
Papa ISO2 100 24 10 4
Papa ISO3 1,000 237 102 35 8
Papa ISO4 10,000 2,370 1,020 352 83
ISO Papa5 100,000 23,700 10,200 3,520 832 29
ISO Papa6 1,000,000 237,000 102,000 35,200 8,320 293
Papa ISO7       352,000 83,200 2,930
Papa ISO8       3,520,000 832,000 29,300
Papa ISO9       35,200,000 8,320,000 293,000

 

ʻO ka papa hoʻohālikelike pili o nā māka maʻemaʻe ma nā ʻāina like ʻole

PCS/M≥0.5um ISO

14644-1(1999)

US

209E(1992)

US

209D(1988)

EEC

cGMP(1989)

PALANI

AFNOR(1981)

KELEMĀNIA

VDI 2083(1990)

IAPANA

JAOA(1989)

1 - - - - - - -
3.5 2 - - - - 0 2
10.0 - M1 - - - - -
35.3 3 M1.5 1 - - 1 3
100 - M2 - - - - -
353 4 M2.5 10 - - 2 4
1,000 - M3 - - - - -
3,530 5 M3.5 100 A+B 4,000 3 5
10,000 - M4 - - - - -
35,300 6 M4.5 1,000 1,000 - 4 6
100,000 - M5 - - - - -
353,000 7 M5.5 10,000 C 400,000 5 7
1,000,000 - M6 - - - - -
3,530,000 8 M6.5 100,000 D 4,000,000 6 8
10,000,000 - M7 - - - - -

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